MODELLING AND DEFORMATION ANALYSIS OF MEMS DIAPGHRAM BASED PRESSURE SENSOR

Abstract:
Micro-electromechanical Systems (MEMS) diaphragm based pressure sensors are widely used for environmental
applications. The primary goal of this
project is to develop, model, and analyse
the sensitivity of a MEMS-based
diaphragm that utilizes different structures
of the same area and material to sense
different pressure changes. Deflection and
sensitivity of diaphragm have been studied
with the COMSOL Multiphysics5.0V, for
simulation purposes. When the pressure is
altered, the diaphragm bends, which
affects the displacement of the diaphragm.
This change in displacement gives the
measure of pressure in the environment.
The sensitivity of the diaphragm can be
increased by employing this approach.
Here, a comparison of four sides clamped
circular, square, and rectangular
diaphragms reveals that the circular
diaphragm provides superior displacement
and high sensitivity.
Keywords- Sensors, Boundary,
MEMS, Pressure sensors, COMSOL